8/30/2010	1:09:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2010	1:09:35 AM	Recipe started at 1:09 AM
8/30/2010	1:09:35 AM	H2 valve closed
8/30/2010	1:09:35 AM	BCl3 valve closed
8/30/2010	1:09:35 AM	PH3 valve closed
8/30/2010	1:09:35 AM	SiCl4 pre valve closed
8/30/2010	1:09:35 AM	SiCl4 post valve closed
8/30/2010	1:09:35 AM	Main Vac valve closed
8/30/2010	1:09:35 AM	Bypass valve closed
8/30/2010	1:09:35 AM	Bubbler valve closed
8/30/2010	1:09:35 AM	Helium valve opened
8/30/2010	1:09:35 AM	Helium MFC set to  500.000000
8/30/2010	1:09:35 AM	H2 MFC set to  0.000000
8/30/2010	1:09:35 AM	BCl3 MFC set to  0.000000
8/30/2010	1:09:35 AM	PHl3 MFC set to  0.000000
8/30/2010	1:09:35 AM	SiCl4 MFC set to  0.000000
8/30/2010	1:09:35 AM	Bypass solenoid MFC set to  0.000000
8/30/2010	1:09:35 AM	Tube furnace set to 0
8/30/2010	1:10:56 AM	Helium valve closed
8/30/2010	1:10:56 AM	H2 valve closed
8/30/2010	1:10:56 AM	BCl3 valve closed
8/30/2010	1:10:56 AM	PH3 valve closed
8/30/2010	1:10:56 AM	SiCl4 pre valve closed
8/30/2010	1:10:56 AM	SiCl4 post valve closed
8/30/2010	1:10:56 AM	Main Vac valve closed
8/30/2010	1:10:56 AM	Bypass valve closed
8/30/2010	1:10:56 AM	Bubbler valve closed
8/30/2010	1:10:56 AM	Helium MFC set to  0.000000
8/30/2010	1:10:56 AM	H2 MFC set to  0.000000
8/30/2010	1:10:56 AM	BCl3 MFC set to  0.000000
8/30/2010	1:10:56 AM	PHl3 MFC set to  0.000000
8/30/2010	1:10:56 AM	SiCl4 MFC set to  0.000000
8/30/2010	1:10:56 AM	Bypass solenoid MFC set to  0.000000
8/30/2010	1:10:56 AM	Tube furnace set to 0
8/30/2010	1:10:56 AM	Run finished at 1:10 AM
8/30/2010	1:10:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/30/2010	1:30:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2010	1:30:30 AM	Recipe started at 1:30 AM
8/30/2010	1:30:30 AM	Helium valve closed
8/30/2010	1:30:30 AM	H2 valve closed
8/30/2010	1:30:30 AM	BCl3 valve closed
8/30/2010	1:30:30 AM	PH3 valve closed
8/30/2010	1:30:30 AM	SiCl4 pre valve closed
8/30/2010	1:30:30 AM	SiCl4 post valve closed
8/30/2010	1:30:30 AM	Main Vac valve closed
8/30/2010	1:30:30 AM	Bubbler valve closed
8/30/2010	1:30:30 AM	Bypass valve opened
8/30/2010	1:30:30 AM	Helium MFC set to  0.000000
8/30/2010	1:30:30 AM	H2 MFC set to  0.000000
8/30/2010	1:30:30 AM	BCl3 MFC set to  0.000000
8/30/2010	1:30:30 AM	PHl3 MFC set to  0.000000
8/30/2010	1:30:30 AM	SiCl4 MFC set to  0.000000
8/30/2010	1:30:30 AM	Bypass solenoid MFC set to  0.000000
8/30/2010	1:30:31 AM	Tube furnace set to 0
8/30/2010	1:31:10 AM	Helium valve closed
8/30/2010	1:31:10 AM	H2 valve closed
8/30/2010	1:31:10 AM	BCl3 valve closed
8/30/2010	1:31:10 AM	PH3 valve closed
8/30/2010	1:31:10 AM	SiCl4 pre valve closed
8/30/2010	1:31:10 AM	SiCl4 post valve closed
8/30/2010	1:31:10 AM	Bubbler valve closed
8/30/2010	1:31:10 AM	Main Vac valve opened
8/30/2010	1:31:10 AM	Bypass valve opened
8/30/2010	1:31:10 AM	Helium MFC set to  0.000000
8/30/2010	1:31:10 AM	H2 MFC set to  0.000000
8/30/2010	1:31:10 AM	BCl3 MFC set to  0.000000
8/30/2010	1:31:10 AM	PHl3 MFC set to  0.000000
8/30/2010	1:31:10 AM	SiCl4 MFC set to  0.000000
8/30/2010	1:31:10 AM	Bypass solenoid MFC set to  0.000000
8/30/2010	1:31:10 AM	Tube furnace set to 0
8/30/2010	1:31:10 AM	Run finished at 1:31 AM
8/30/2010	1:31:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/30/2010	11:20:44 PM	Bypass valve closed
8/30/2010	11:20:44 PM	Main Vac valve closed
8/30/2010	11:20:46 PM	Bypass valve opened
8/30/2010	11:20:47 PM	Main Vac valve opened
